A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
نویسندگان
چکیده
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoe t U e ©
منابع مشابه
Cylindrical Micro Ultrasonic Motor Utilizing Bulk Lead Zirconate Titanate (PZT)
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